Structural, optical and electrical characterization of ITO, ITO/Ag and ITO/Ni transparent conductive electrodes

被引:31
作者
Ali, Ahmad Hadi [1 ,2 ]
Shuhaimi, Ahmad [3 ]
Hassan, Zainuriah [1 ]
机构
[1] Univ Sains Malaysia, Nanooptoelect Res & Technol Lab, Sch Phys, George Town, Malaysia
[2] Univ Tun Hussein Onn Malaysia, Dept Sci, Fac Sci Technol & Human Dev, Johor Baharu, Malaysia
[3] Univ Malaya, Dept Phys, Low Dimens Mat Res Ctr, Fac Sci, Kuala Lumpur 59100, Malaysia
关键词
ITO; ITO/Ag; ITO/Ni; Sputtering; Transparent conductive oxides; LIGHT-EMITTING-DIODES; OXIDE THIN-FILMS; PHYSICAL-PROPERTIES; OHMIC CONTACTS; TIN; TEMPERATURE; IMPROVEMENT; GAN; MICROSTRUCTURE; INTERFACE;
D O I
10.1016/j.apsusc.2013.10.079
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We report on the transparent conductive oxides (TCO) characteristics based on the indium tin oxides (ITO) and ITO/metal thin layer as an electrode for optoelectronics device applications. ITO, ITO/Ag and ITO/Ni were deposited on Si and glass substrate by thermal evaporator and radio frequency (RF) magnetron sputtering at room temperature. Post deposition annealing was performed on the samples in air at moderate temperature of 500 degrees C and 600 degrees C. The structural, optical and electrical properties of the ITO and ITO/metal were characterized using X-ray diffraction (XRD), UV-Vis spectrophotometer, Hall effect measurement system and atomic force microscope (AFM). The XRD spectrum reveals significant polycrystalline peaks of ITO (2 2 2) and Ag (1 1 1) after post annealing process. The post annealing also improves the visible light transmittance and electrical resistivity of the samples. Figure of merit (FOM) of the ITO, ITO/Ag and ITO/Ni were determined as 5.5 x 10(-3) Omega(-1), 8.4 x 10(-3) Omega(-1) and 3.0 x 10(-5) Omega(-1), respectively. The results show that the post annealed ITO with Ag intermediate layer improved the efficiency of the transparent conductive electrodes (TCE) as compared to the ITO and ITO/Ni. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:599 / 603
页数:5
相关论文
共 50 条
[31]   Performance characterization of InGaP Schottky contact with ITO transparent electrodes [J].
Ching-Ting Lee ;
Ching-Hung Fu ;
Chang-Da Tsai ;
Wei Lin .
Journal of Electronic Materials, 1998, 27 :1017-1021
[32]   Transparent polyimides and Their ITO flexible conductive film [J].
Lu, YunHua ;
Hu, ZhiZhi ;
Bian, JiMing ;
Wang, YongFei .
ADVANCED MATERIALS, PTS 1-4, 2011, 239-242 :1211-+
[33]   Effect of annealing temperature in nitrogen atmosphere and under vacuum on structural, optical and electrical properties of sputtered ITO/Ni/ITO multilayer [J].
Agdad, Abdelali ;
Tchenka, Abdelaziz ;
Chaik, Mounir ;
Hnawi, Salma Kaotar ;
Azizan, Mustapha ;
Ech-chamikh, Elmaati ;
Ijdiyaou, Youssef .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2022, 128 (04)
[34]   Properties of ITO/Cu/ITO Multilayer Films for Application as Low Resistance Transparent Electrodes [J].
Kim, Daeil .
TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS, 2009, 10 (05) :165-168
[35]   Optical and electrical studies of transparent conductive AZO and ITO sputtered thin films for CIGS photovoltaics [J].
Mereu, R. A. ;
Marchionna, S. ;
Le Donne, A. ;
Ciontea, L. ;
Binetti, S. ;
Acciarri, M. .
PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 11, NO 9-10, 2014, 11 (9-10) :1464-1467
[36]   Sputtered ITO/Ag/ITO Films: Growth Windows and Ag/ITO Interfacial Properties [J].
Lei, Pei ;
Chen, Xiaoting ;
Yan, Yue ;
Zhang, Xuan ;
Hao, Changshan ;
Peng, Jingjing ;
Ji, Jianchao ;
Zhong, Yanli .
JOURNAL OF ELECTRONIC MATERIALS, 2022, 51 (05) :2645-2651
[37]   ITO/AgNW/ITO stacked flexible electrodes [J].
Hsu, Ching-Ming ;
Tsai, Su-Hui ;
Huang, Yan-Yee ;
Wu, Wen-Tuan .
2018 7TH IEEE INTERNATIONAL SYMPOSIUM ON NEXT-GENERATION ELECTRONICS (ISNE), 2018, :435-437
[38]   Structural, Optical and Electrical Properties of ITO Thin Films [J].
Sofi, A. H. ;
Shah, M. A. ;
Asokan, K. .
JOURNAL OF ELECTRONIC MATERIALS, 2018, 47 (02) :1344-1352
[39]   Annealing effect of ITO and ITO/Cu transparent conductive films in low pressure hydrogen atmosphere [J].
Lin, TC ;
Chang, SC ;
Chiu, CF .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2006, 129 (1-3) :39-42
[40]   The optical and electrical properties of Eu3+-Y3+ codoped ITO transparent conductive electrodes as luminescent solar concentrators [J].
Ting, C. -C. ;
Tsai, C. -H. .
ENERGY AND SUSTAINABILITY II, 2009, 121 :79-89