A multilevel newton method for mixed-energy domain simulation of MEMS

被引：30

作者：

Aluru, NR ^{[1
]}

White, J

机构：

[1] Univ Illinois, Beckman Inst, Urbana, IL 61801 USA

[2] Univ Illinois, Dept Gen Engn, Urbana, IL 61801 USA

[3] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1999年 / 8卷 / 03期

关键词：

MEMS modeling; mixed-energy domain simulation; multilevel Newton method; relaxation technique;

D O I：

10.1109/84.788634

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An efficient black-box algorithm for self-consistent analysis of three-dimensional (3-D) microelectromechanical systems (MEMS) is described. The algorithm is matrix-free based and employs a multilevel Newton technique to solve the coupled electromechanical equations. The new approach is shown to converge very rapidly and is much faster than relaxation algorithm for tightly coupled cases. While this paper focuses on coupled electromechanical analysis, the proposed algorithm can be extended to include several coupled domains typically encountered in MEMS.

引用

页码：299 / 308

页数：10

共 15 条

[1] Aluru N. R., 1996, Technical Digest. Solid-State Sensor and Actuator Workshop, P54
[2] An efficient numerical technique for electromechanical simulation of complicated microelectromechanical structures
Aluru, NR
White, J
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1997, 58 (01) : 1 - 11
[3] Bachtold M, 1995, INTERNATIONAL ELECTRON DEVICES MEETING, 1995 - IEDM TECHNICAL DIGEST, P605, DOI 10.1109/IEDM.1995.499294
[4] Bathe K.-J., 1975, International Journal for Numerical Methods in Engineering, V9, P353, DOI 10.1002/nme.1620090207
[5] Cai X., 1993, P 1993 INT C COMPUTE, P283, DOI [10.1109/ICCAD.1993.580070, DOI 10.1109/ICCAD.1993.580070]
[6] VARIATIONAL ITERATIVE METHODS FOR NONSYMMETRIC SYSTEMS OF LINEAR-EQUATIONS
EISENSTAT, SC
ELMAN, HC
SCHULTZ, MH
[J]. SIAM JOURNAL ON NUMERICAL ANALYSIS, 1983, 20 (02) : 345 - 357
[7] SOLIDIS: A tool for microactuator simulation in 3-D
Funk, JM
Korvink, JG
Buhler, J
Bachtold, M
Baltes, H
[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1997, 6 (01) : 70 - 82
[8] GILBERT JR, 1995, MICRO ELECTRO MECHANICAL SYSTEMS - IEEE PROCEEDINGS, 1995, P122, DOI 10.1109/MEMSYS.1995.472542
[9] GREENGARD L, 1988, RAPID EVOLUTION POTE
[10] FASTCAP - A MULTIPOLE ACCELERATED 3-D CAPACITANCE EXTRACTION PROGRAM
NABORS, K
WHITE, J
[J]. IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS, 1991, 10 (11) : 1447 - 1459

← 1 2 →