Design and Simulation of Film Bulk Acoustic Wave Resonator in Ku-band

被引：3

作者：

Nor, N. Izza M. ^{[1
]}

Shah, K. ^{[1
]}

Singh, J. ^{[1
]}

Sauli, Z. ^{[2
]}

机构：

[1] La Trobe Univ, Ctr Technol Infus, Melbourne, Vic 3086, Australia

[2] Univ Malaysia Perlis, Sch Microelect Engn, Perlis 02600, Malaysia

来源：

NANOTECHNOLOGY AND PRECISION ENGINEERING, PTS 1 AND 2 | 2013年 / 662卷

关键词：

FBAR; FBAR filter; RF MEMS; Ku-band;

D O I：

10.4028/www.scientific.net/AMR.662.556

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This paper presents the design of a Film Bulk Acoustic Wave Resonators (FBARs) operating in Ku-band. The one-dimensional (1-D) numerical and the three-dimension (3-D) Finite Element Method (FEM) simulation results are analysed and compared. The results show that coupling coefficient (k(eff)(2)) up to 6.5% can be obtained with optimised thickness ratio of electrode/piezoelectric layers of operating frequencies greater than 15GHz. The FBARs have areas of 1.69x10(-4)mu m(2) and 7.84x10(-4)mu m(2) for series resonance frequency of 14.7GHz and 15.9GHz respectively and achieves quality (Q) factor of 300. The designed FBAR filter operating in Ku-band has the centre frequency of 15.5 GHz, the insertion loss of 3.5dB, out-of-band rejection of 13dB and fractional bandwidth of 6.6%.

引用

页码：556 / +

页数：2

共 16 条

[1]

[Anonymous], INT C EL ENG COMP SC

[2] Modified BVD-equivalent circuit of FBAR by taking electrodes into account [J].

Chao, MC ;

Huang, ZN ;

Pao, SY ;

Wang, Z ;

Lam, CS .

2002 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2002, :973-976

[3] The effective electromechanical coupling coefficient of piezoelectric thin-film resonators [J].

Chen, QM ;

Wang, QM .

APPLIED PHYSICS LETTERS, 2005, 86 (02) :022904-1

[4]

FBAR Design Tutorial Coventor Ware&REG

[5]

., 2010, MEMS DESIGN ANAL TUT, V2

[6]

Hara Motoaki, 2009, 2009 IEEE International Ultrasonics Symposium, P851, DOI 10.1109/ULTSYM.2009.5441576

[7] X-band filters utilizing A1N thin film bulk acoustic resonators [J].

Hara, Motoaki ;

Yokoyama, Tsuyoshi ;

Ueda, Masanori ;

Satoh, Yoshio .

2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6, 2007, :1152-1155

[8]

II Wauk M.T., 1969, ATTENUATION MICROWAV

[9]

Izza K. S. N., 2012, ACTIVE PASSIVE UNPUB

[10] Closed-form expressions for the design of ladder-type FBAR filters [J].

Menendez, Oscar ;

de Paco, Pedro ;

Villarino, Ramon ;

Parron, Josep .

IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, 2006, 16 (12) :657-659

← 1 2 →