The self-preserving size distribution theory II.: Comparison with experimental results for Si and Si3N4 aerosols

被引:5
作者
Dekkers, PJ
Tuinman, IL
Marijnissen, JCM
Friedlander, SK
Scarlett, B
机构
[1] Univ Calif Los Angeles, Dept Engn, Los Angeles, CA USA
[2] Delft Univ Technol, Dept Chem Engn, Delft, Netherlands
基金
美国国家科学基金会;
关键词
self-preserving size distribution; model; fractal; fractal-like dimension; power law; agglomerate; aerosol production; laser reactor; silicon; silicon nitride; thermophoretic sampling; semiconductor; nanoparticles;
D O I
10.1006/jcis.2002.8213
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The gas to particle synthesis route is a relatively clean and efficient manner for the production of high-quality ceramic powders. These powders can be subsequently sintered in any wanted shape. The modeling of these production systems is difficult because several mechanisms occur in parallel. From theoretical considerations it can be determined, however, that coagulation and sintering are dominant mechanisms as far as shape and size of the particles are considered. In part I of this article an extensive theoretical analysis was given on the self-preserving size distribution theory for power law particles. In this second part, cumulative particle size distributions of silicon and silicon nitride agglomerates, produced in a laser reactor, were determined from TEM pictures and compared to the distributions calculated from this selfpreserving theory for power law particles. The calculated distributions were in fair agreement with the measured results, especially at the high end of the distributions. Calculated and measured particle growth rates were also in fair agreement. Using the self-preserving theory an analysis was made on the distribution of annealed silicon agglomerates, of interest in applications to nanoparticle technology. (C) 2002 Elsevier Science (USA).
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页码:306 / 314
页数:9
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