Integrated sensor for ultra-thin layer sensing based on hybrid coupler with short-range surface plasmon polariton and dielectric waveguide

被引：21

作者：

Fan, Boyu ^{[1
]}

Liu, Fang ^{[1
]}

Wang, Xiaoyan ^{[1
]}

Li, Yunxiang ^{[1
]}

Cui, Kaiyu ^{[1
]}

Feng, Xue ^{[1
]}

Huang, Yidong ^{[1
]}

机构：

[1] Tsinghua Univ, Dept Elect Engn, State Key Lab Integrated Optoelect, Beijing 100084, Peoples R China

来源：

APPLIED PHYSICS LETTERS | 2013年 / 102卷 / 06期

基金：

中国国家自然科学基金;

关键词：

RESONANCE SENSOR; DEPENDENCE;

D O I：

10.1063/1.4792319

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Based on a hybrid coupler composed of short-range surface plasmon polariton (SRSPP) and dielectric waveguides, an integrated sensor for ultra-thin layer sensing has been realized. The simulation and experiment results demonstrate that the thickness variation of detection layer (polymer layer) about several nanometers could be detected. The measured thickness-detection sensitivity is as high as 0.67 dB/nm. And the sensitive region for thickness variation of polymer layer can be adjusted widely by varying the thickness of the SRSPP waveguide. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4792319]

引用

页数：4

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