Optimization study of a soft x ray flat field spectrometer

被引:7
作者
Liu, YQ [1 ]
Jie, Z [1 ]
Chen, ZL [1 ]
Peng, XY [1 ]
机构
[1] Chinese Acad Sci, Inst Phys, Lab Opt Phys, Beijing 100080, Peoples R China
关键词
soft x ray flat field spectrometer; optical path function; ray tracing;
D O I
10.7498/aps.53.1433
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Using ray tracing code and optical path function, optimization calculation is carried out on a grazing incidence soft x ray flat field spectrometer with toroidal mirror as prepositive optic system. We calculate the spectral and spatial resolution of the spectrometer system. The wave front aberration theory and ray tracing code indicate that the system has good spectral resolution (lambda/Deltalambda)better than 1000 and spatial resolution better than 40 mum in the spectrum range of 4-45 nm.
引用
收藏
页码:1433 / 1439
页数:7
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