Magnetic induction machines integrated into bulk-micromachined silicon

被引：19
作者：
Arnold, DP
Das, S
Cros, F
Zana, I
Allen, MG
Lang, JH
机构：
[1] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA
[2] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA
[3] MIT, Lab Elect & Elect Syst, Cambridge, MA 02139 USA
来源：
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2006年 / 15卷 / 02期
基金：
美国国家科学基金会;
关键词：
AC generators; induction machines; magnetic materials; MEMS; micromachining;
D O I：
10.1109/JMEMS.2006.873951
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density, silicon-based microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials (Cu, Ni80Fe20, Co65Fe18Ni17) within bulk-micromachined and fusion-bonded silicon to form the machine structures. The induction machines were characterized in motoring mode using tethered rotors, and exhibited a maximum measured torque of 2.5 mu N-m.
引用
收藏
页码：406 / 414
页数：9
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