NANOMETER-THICK TEXTURED ZnO FILMS: PREPARATION, CHARACTERIZATION AND INTERACTION WITH ETHANOL VAPOR

被引：1
作者：
Naumenko, D. [1 ]
Snitka, V. [1 ]
Ulcinas, A. [1 ]
Naumenko, I. [1 ]
Grigoras, K. [2 ]
机构：
[1] Kaunas Univ Technol, Res Ctr Microsyst & Nanotechnol, LT-51369 Kaunas, Lithuania
[2] VTT Tech Res Ctr Finland, FI-02044 Helsinki, Finland
来源：
THEORETICAL AND EXPERIMENTAL CHEMISTRY | 2013年 / 49卷 / 02期
关键词：
zinc oxide films; thin films; atomic layer deposition; piezoresponse force microscopy; ATOMIC LAYER DEPOSITION; ZINC;
D O I：
10.1007/s11237-013-9300-3
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
A study was carried out on the effect of the reaction temperature in atomic layer deposition on the structural and piezoelectric properties of thin ZnO films (5-50 nm) by scanning electron microscopy, X-ray diffraction, piezoresponse force microscopy, and surface acoustic wave (SAW) spectroscopy. The piezoresponse was shown to be mainly a function of ZnO grain size and the monocrystalline structure perpendicular to the substrate plane. The results demonstrate promise for the use of textured ZnO films as sensitive coatings for acoustic gas sensors in instruments based on the SAW transducer amplification-frequency response.
引用
收藏
页码：96 / 102
页数：7
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