Knowledge-based process simulation and design system for MEMS

被引：0

作者：

Popp, J ^{[1
]}

Schmidt, T

Wagener, A

Hahn, K

Brück, R

Hössinger, A

机构：

[1] Univ Siegen, Inst Microsyst Technol, D-57068 Siegen, Germany

[2] Silvaco Technol Ctr, Cambridge PE27 5JL, England

来源：

MICROELECTRONICS: DESIGN, TECHNOLOGY, AND PACKAGING II | 2006年 / 6035卷

关键词：

TCAD; MEMS; process management; process design; process tracking;

D O I：

10.1117/12.638483

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A design model representing the relations between application specific fabrication processes and the structural design flow will be presented. Subsequently a MEMS process designs simulation and tracking system, called PROMENADE, is introduced. It allows the specification of processes for specific applications, the simulation and the tracking of the development procedures.

引用

页数：8