High-rate dual-target dc magnetron sputter deposition of electrochromic MoO3 films

被引：29
作者：
Kharrazi, M
Azens, A
Kullman, L
Granqvist, CG
机构：
[1] Department of Materials Science, Uppsala University, S-751 21 Uppsala
来源：
THIN SOLID FILMS | 1997年 / 295卷 / 1-2期
关键词：
molybdenum oxide; optical properties; sputtering;
D O I：
10.1016/S0040-6090(96)09306-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Mo oxide films with good electrochromic properties were produced by single-target and dual-target reactive d.c. magnetron sputtering. Dual-target deposition was shown capable of yielding optically functional films at a rate similar to 20 times higher than that for single-target deposition, which is a result of considerable technical interest. (C) 1997 Elsevier Science S.A.
引用
收藏
页码：117 / 121
页数：5
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