Recent advances in focused ion beam technology and applications

被引:121
作者
Bassim, Nabil [1 ]
Scott, Keana [2 ]
Giannuzzi, Lucille A. [3 ,4 ]
机构
[1] US Naval Res Lab, Washington, DC 20375 USA
[2] NIST, Mat Measurement Sci Div, Gaithersburg, MD 20899 USA
[3] LA Giannuzzi & Associates LLC, Ft Myers, FL USA
[4] EXpressLO LLC, Ft Myers, FL USA
关键词
focused ion beam (FIB); scanning electron microscopy (SEM); lithography; ion-solid interactions; tomography; 3D microstructure; SPECIMEN PREPARATION; SAMPLE PREPARATION; HIGH-RESOLUTION; ELECTRON-MICROSCOPY; MICROSTRUCTURAL CHARACTERIZATION; BIOLOGICAL SPECIMENS; PLASMA SOURCE; LIFT-OUT; LIQUID; TEM;
D O I
10.1557/mrs.2014.52
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Focused ion beam microscopes are extremely versatile and powerful instruments for materials research. These microscopes, when coupled in a system with a scanning electron microscope, offer the opportunity for novel sample imaging, sectioning, specimen preparation, three-dimensional (3D) nano- to macroscale tomography, and high resolution rapid prototyping. The ability to characterize and create materials features in a site-specific manner at nanoscale resolution has provided key insights into many materials systems. The advent of novel instrumentation, such as new ion sources that encompass more and more of the periodic table, in situ test harnesses such as cryogenic sample holders for sensitive material analyses, novel detector configurations for 3D structural, chemical, and ion contrast characterization, and robust and versatile process automation capabilities, is an exciting development for many fields of materials research.
引用
收藏
页码:317 / 325
页数:9
相关论文
共 147 条
[81]   The neon gas field ion source-a first characterization of neon nanomachining properties [J].
Livengood, Richard H. ;
Tan, Shida ;
Hallstein, Roy ;
Notte, John ;
McVey, Shawn ;
Rahman, F. H. M. Faridur .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2011, 645 (01) :136-140
[82]   Multiscale tomographic analysis of polymer-nanoparticle hybrid materials for solar cells [J].
Lopez-Haro, Miguel ;
Jiu, Tonggang ;
Bayle-Guillemaud, Pascale ;
Jouneau, Pierre-Henri ;
Chandezon, Frederic .
NANOSCALE, 2013, 5 (22) :10945-10955
[83]   Correlative In Vivo 2 Photon and Focused Ion Beam Scanning Electron Microscopy of Cortical Neurons [J].
Maco, Bohumil ;
Holtmaat, Anthony ;
Cantoni, Marco ;
Kreshuk, Anna ;
Straehle, Christoph N. ;
Hamprecht, Fred A. ;
Knott, Graham W. .
PLOS ONE, 2013, 8 (02)
[84]   Materials for multiphoton 3D microfabrication [J].
Marder, Seth R. ;
Bredas, Jean-Luc ;
Perry, Joseph W. .
MRS BULLETIN, 2007, 32 (07) :561-565
[85]   Focused-ion-beam thinning of frozen-hydrated biological specimens for cryo-electron microscopy [J].
Marko, Michael ;
Hsieh, Chyongere ;
Schalek, Richard ;
Frank, Joachim ;
Mannella, Carmen .
NATURE METHODS, 2007, 4 (03) :215-217
[86]   Electron backscattering diffraction investigation of focused ion beam surfaces [J].
Matteson, TL ;
Schwarz, SW ;
Houge, EC ;
Kempshall, BW ;
Giannuzzi, LA .
JOURNAL OF ELECTRONIC MATERIALS, 2002, 31 (01) :33-39
[87]   TEM sample preparation and FIB-induced damage [J].
Mayer, Joachim ;
Giannuzzi, Lucille A. ;
Kamino, Takeo ;
Michael, Joseph .
MRS BULLETIN, 2007, 32 (05) :400-407
[88]   Long-life bismuth liquid metal ion source for focussed ion beam micromachining application [J].
Mazarov, P. ;
Melnikov, A. ;
Wernhardt, R. ;
Wieck, A. D. .
APPLIED SURFACE SCIENCE, 2008, 254 (22) :7401-7404
[89]   Alloy liquid metal ion source for carbon focused ion beams [J].
Mazarov, P. ;
Wieck, A. D. ;
Bischoff, L. ;
Pilz, W. .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 27 (06) :L47-L49
[90]   FOCUSED ION-BEAM TECHNOLOGY AND APPLICATIONS [J].
MELNGAILIS, J .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (02) :469-495