Recent advances in focused ion beam technology and applications

被引:121
作者
Bassim, Nabil [1 ]
Scott, Keana [2 ]
Giannuzzi, Lucille A. [3 ,4 ]
机构
[1] US Naval Res Lab, Washington, DC 20375 USA
[2] NIST, Mat Measurement Sci Div, Gaithersburg, MD 20899 USA
[3] LA Giannuzzi & Associates LLC, Ft Myers, FL USA
[4] EXpressLO LLC, Ft Myers, FL USA
关键词
focused ion beam (FIB); scanning electron microscopy (SEM); lithography; ion-solid interactions; tomography; 3D microstructure; SPECIMEN PREPARATION; SAMPLE PREPARATION; HIGH-RESOLUTION; ELECTRON-MICROSCOPY; MICROSTRUCTURAL CHARACTERIZATION; BIOLOGICAL SPECIMENS; PLASMA SOURCE; LIFT-OUT; LIQUID; TEM;
D O I
10.1557/mrs.2014.52
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Focused ion beam microscopes are extremely versatile and powerful instruments for materials research. These microscopes, when coupled in a system with a scanning electron microscope, offer the opportunity for novel sample imaging, sectioning, specimen preparation, three-dimensional (3D) nano- to macroscale tomography, and high resolution rapid prototyping. The ability to characterize and create materials features in a site-specific manner at nanoscale resolution has provided key insights into many materials systems. The advent of novel instrumentation, such as new ion sources that encompass more and more of the periodic table, in situ test harnesses such as cryogenic sample holders for sensitive material analyses, novel detector configurations for 3D structural, chemical, and ion contrast characterization, and robust and versatile process automation capabilities, is an exciting development for many fields of materials research.
引用
收藏
页码:317 / 325
页数:9
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