Local bond length variations in boron-doped nanocrystalline diamond measured by spatially resolved electron energy-loss spectroscopy

被引：14
|
作者：
Lu, Ying-Gang [1 ]
Turner, Stuart [1 ]
Verbeeck, Johan [1 ]
Janssens, Stoffel D. [2 ,3 ]
Haenen, Ken [2 ,3 ]
Van Tendeloo, Gustaaf [1 ]
机构：
[1] Univ Antwerp, EMAT, B-2020 Antwerp, Belgium
[2] Hasselt Univ, Inst Mat Res IMO, B-3950 Diepenbeek, Belgium
[3] IMEC VZW, IMOMEC, B-3590 Diepenbeek, Belgium
来源：
APPLIED PHYSICS LETTERS | 2013年 / 103卷 / 03期
关键词：
DEFECTS; FILMS;
D O I：
10.1063/1.4813842
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Variations in local bond length and coordination in boron-doped nanocrystalline diamond (NCD) films have been studied through changes in the fine structure of boron and carbon K-edges in electron energy-loss spectra, acquired in a scanning transmission electron microscope. The presence of high concentrations of B in pristine diamond regions and enrichment of B at defects in single NCD grains is demonstrated. Local bond length variations are evidenced through an energy shift of the carbon 1s ->sigma* edge at B-rich defective regions within single diamond grains, indicating an expansion of the diamond bond length at sites with local high B content. (C) 2013 AIP Publishing LLC.
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页数：5
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