High power amplification of solid-state Nd:YAG laser with short pulses of 300ps/5kHz

被引：0
|
作者：
Wang, T [1 ]
Fujita, H [1 ]
Mitra, A [1 ]
Tsubakimoto, K [1 ]
Fujimoto, Y [1 ]
Yoshida, H [1 ]
Nakatsuka, M [1 ]
机构：
[1] Osaka Univ, Inst Laser Engn, Suita, Osaka 565, Japan
来源：
2005 CONFERENCE ON LASERS & ELECTRO-OPTICS (CLEO), VOLS 1-3 | 2005年
关键词：
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A double pass diode-pumped Nd:YAG rod laser pre-amplifier for EUV lithography has been demonstrated. An average output power as great as 81W with excellent beam quality is available for injection pulse duration of 300ps. (c) 2005 Optical Society of America
引用
收藏
页码：773 / 775
页数：3
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