共 50 条
[22]
Diffusion of light elements in 4H-and 6H-SiC
[J].
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY,
1999, 61-2
:275-280
[28]
Growth of Large Diameter 6H SI and 4H n+ SiC Single Crystals
[J].
B - SILICON CARBIDE 2010-MATERIALS, PROCESSING AND DEVICES,
2010, 1246
[30]
Characterization of Large Area 4H-SiC and 6H-SiC Capacitive Devices at 600 °C
[J].
SILICON CARBIDE AND RELATED MATERIALS 2011, PTS 1 AND 2,
2012, 717-720
:1187-1189