A TRL-Like calibration for tunable interdigitated BST varactors

被引：6

作者：

Burgnies, Ludovic ^{[1
]}

Velu, Gabriel ^{[1
]}

Houzet, Gregory ^{[2
]}

Blary, Karine ^{[2
]}

Carru, Jean-Claude ^{[1
]}

Lippeas, Didier ^{[2
]}

机构：

[1] Univ Littoral Cote dOpale, LEMCEL, F-62228 Calais, France

[2] Univ Sci & Technol Lille, Dept Hyperfrequences & Semicond, Inst Elect Microelect & Nanotechnol, F-59652 Villeneuve Dascq, France

来源：

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 2008年 / 57卷 / 06期

关键词：

coplanar lines; ferroelectric; interdigitated capacitor; phase shifter; tunable;

D O I：

10.1109/TIM.2007.915120

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on a de-embedding technique for measuring the reflection coefficients of comblike capacitors patterned on barium-strontium-titanate (BST) ferroelectric films. The technique is derived from the thru-reflect-line calibration technique and is combined with conformal mapping to retrieve the complex permittivity of BST thin films. The accuracy of the method is demonstrated over a broad frequency for 0.3-mu m-thick BaxSr1-xTiO3, with x = 0.5, in a paraelectric state, grown by a sol-gel technique. The samples are characterized up to 35 GHz and exhibit a constant permittivity of 245 +/- 12%, which is in good agreement with the values deduced from propagation wave constants of BST transmission lines.

引用

页码：1127 / 1132

页数：6

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