Influence of Carbon Content on Surface Quality of Solid-State Sintered SiC Ceramics

被引：13

作者：

Gao, Jianqin ^{[1
]}

Chen, Jian ^{[2
]}

Liu, Guiling ^{[2
]}

Yan, Yongjie ^{[2
]}

Huang, Zhengren ^{[2
]}

机构：

[1] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China

[2] Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 20050, Peoples R China

来源：

INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY | 2012年 / 9卷 / 04期

关键词：

MATERIAL-REMOVAL MECHANISMS; ELID GRINDING PROCESS; SILICON-CARBIDE; MIRROR; DAMAGE; MICROSTRUCTURE; INDENTATION; PERFORMANCE; FABRICATION; BEHAVIORS;

D O I：

10.1111/j.1744-7402.2011.02671.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Influence of carbon content on surface quality of solid-state sintered SiC ceramics with nearly full density was first investigated. Comparison study was carried out with varying carbon contents of 2, 3, and 6 wt%, respectively. Investigation on surface morphology using atomic force microscope reveals that residual carbon presents as protuberances on the polished surface. The surface quality of the polished samples was improved by decreasing carbon content, and with 2 wt% carbon, the surface quality can reach 0.7 nm rms surface roughness after polishing. It offers a material-design approach to improve surface quality of solid-state sintered SiC ceramics.

引用

页码：847 / 852

页数：6

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