Preface to Special Topic: Electron kinetic effects in low temperature plasmas

被引：0
作者：
Kaganovich, Igor D. [1 ]
Godyak, Valery [2 ,3 ]
Kolobov, Vladimir I. [4 ]
机构：
[1] Princeton Univ, Princeton Plasma Phys Lab, Princeton, NJ 08543 USA
[2] RF Plasma Consulting, Brookline, MA 02446 USA
[3] Univ Michigan, Michigan Inst Plasma Sci & Engn, Ann Arbor, MI 48109 USA
[4] CFD Res Corp, Huntsville, AL 35805 USA
来源：
PHYSICS OF PLASMAS | 2013年 / 20卷 / 10期
关键词：
24;
D O I：
10.1063/1.4824354
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
A special topic in Physics of Plasma journal regarding electron kinetic effects in low temperature plasmas was dedicated to Professor Lev D. Tsendin, a pioneer and leader in this field. The Review paper by Godyak summarizes methods of EEDF control in gas discharge plasmas. The paper by Golubovskii reviews the latest developments of Tsendin's ideas about kinetic resonances and stratification of glow discharges. Yu. P. Raizer and M. S. Mokrov and S. Macheret and M. Shneyder investigate kinetic effects on physical mechanisms of self-organization in gas discharges of the Townsend type. The effects of magnetic fields on plasma self-organization are studied by V. A. Godyak, V. A. Rozhansky, and J.-Y. Kim, H.-C. Lee, Y.-D. Kim, Y.-C. Kim, and C.-W. Chung. Geometric effects of antenna size on electron kinetics in inductively coupled plasmas are also discussed.
引用
收藏
页数：3
相关论文
共 22 条
  • [1] Multiple solutions in the theory of direct current glow discharges: Effect of plasma chemistry and nonlocality, different plasma-producing gases, and 3D modelling
    Almeida, P. G. C.
    Benilov, M. S.
    [J]. PHYSICS OF PLASMAS, 2013, 20 (10)
  • [2] Multi-dipolar microwave plasmas and their application to negative ion production
    Bechu, S.
    Soum-Glaude, A.
    Bes, A.
    Lacoste, A.
    Svarnas, P.
    Aleiferis, S.
    Ivanov, A. A., Jr.
    Bacal, M.
    [J]. PHYSICS OF PLASMAS, 2013, 20 (10)
  • [3] ELECTRON ENERGY DISTRIBUTIONS IN STATIONARY DISCHARGES
    BERNSTEIN, IB
    HOLSTEIN, T
    [J]. PHYSICAL REVIEW, 1954, 94 (06): : 1475 - 1482
  • [4] Modeling a short dc discharge with thermionic cathode and auxiliary anode
    Bogdanov, E.
    Demidov, V. I.
    Kaganovich, I. D.
    Koepke, M. E.
    Kudryavtsev, A. A.
    [J]. PHYSICS OF PLASMAS, 2013, 20 (10)
  • [5] The role of electron scattering with vibrationally excited nitrogen molecules on non-equilibrium plasma kinetics
    Capitelli, Mario
    Colonna, Gianpiero
    D'Ammando, Giuliano
    Laporta, Vincenzo
    Laricchiuta, Annarita
    [J]. PHYSICS OF PLASMAS, 2013, 20 (10)
  • [6] Electron energy distribution function control in gas discharge plasmas
    Godyak, V. A.
    [J]. PHYSICS OF PLASMAS, 2013, 20 (10)
  • [7] KAGANOVICH I, 2006, 2005 WORKSH NONL COL, P694
  • [8] Narrow gap electronegative capacitive discharges
    Kawamura, E.
    Lieberman, M. A.
    Lichtenberg, A. J.
    [J]. PHYSICS OF PLASMAS, 2013, 20 (10)
  • [9] Transition of electron kinetics in weakly magnetized inductively coupled plasmas
    Kim, Jin-Yong
    Lee, Hyo-Chang
    Kim, Young-Do
    Kim, Young-Cheol
    Chung, Chin-Wook
    [J]. PHYSICS OF PLASMAS, 2013, 20 (10)
  • [10] Advances in electron kinetics and theory of gas discharges
    Kolobov, Vladimir I.
    [J]. PHYSICS OF PLASMAS, 2013, 20 (10)
123