Simulation of a miniature coupled-cavity slow wave structure

被引：0
|
作者：
Zhu, XF [1 ]
Yang, ZH [1 ]
Zeng, BQ [1 ]
机构：
[1] Univ Elect Sci & Technol China, Sch Phys Elect, Chengdu 610054, Peoples R China
来源：
INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES | 2004年 / 25卷 / 05期
关键词：
MEMS; mu VEDs; coupled-cavity SWS; LIGA technology; MAFIA;
D O I：
10.1023/B:IJIM.0000027584.71266.b7
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Recent development of MEMS technologies has provided a set of methods for mass production of three-dimensional micro-scale structures and have opened the door to new and exciting possibilities in vacuum electronics devices. These micro-fabricated vacuum electronic devices are popular for the advantages of small volume, low cost, good performance, etc. in this article, Cold characteristics of a miniature coupled cavity slow-wave structure are simulated and discussed by using 3-D electromagnetic software MAFIA. The results show that thin miniature structure call work at near 1.3 THz with high interaction impedance about 20 ohm and can be expected to be a promising THz radiation source.
引用
收藏
页码：837 / 843
页数：7
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