Generation of Large-Area Highly-Nonequlibrium Plasma in Pure Hydrogen at Atmospheric Pressure

被引：25

作者：

Prysiazhnyi, V. ^{[1
]}

Brablec, A. ^{[1
]}

Cech, J. ^{[1
]}

Stupavska, M. ^{[1
]}

Cernak, M. ^{[1
]}

机构：

[1] Masaryk Univ, Reg R&D Ctr Low Cost Plasma & Nanotechnol Surface, CS-61137 Brno, Czech Republic

来源：

CONTRIBUTIONS TO PLASMA PHYSICS | 2014年 / 54卷 / 02期

关键词：

Diffuse coplanar surface barrier discharge; DCSBD; large area; hydrogen; plasma reduction; oxide reduction; copper; SURFACE-BARRIER DISCHARGE; THIN-FILMS; X-RAY; AIR; COPPER; PHOTOELECTRON; TRANSITION; STABILITY;

D O I：

10.1002/ctpp.201310060

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Diffuse Coplanar Surface Barrier Discharge (DCSBD) is a novel type of atmospheric-pressure plasma source developed for high-speed large-area surface plasma treatments. Basic characteristics of DCSBD operated in pure atmospheric-pressure hydrogen were measured using optical and emission spectroscopy methods, and its potential for the surface treatment application was demonstrated by hydrogen plasma reduction of Cu2O thin layers. The discharge generates a thin layer of diffuse non-equilibrium plasma with a high power density of 70 Wcm(-3). The mean electron density and electron temperature derived from spectroscopic data were 1.3 x 10(16)cm(-3) and 19 x 10(3)K, and the surface Cu2O layers forming a weak boundary were reduced to metallic copper within several seconds. ((c) 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

引用

页码：138 / 144

页数：7

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