Structure-composition-property dependence in reactive magnetron sputtered ZnO thin films

Thin films of zinc oxide (ZnO) were prepared by dc reactive magnetron sputtering on glass substrates at various oxygen partial pressures in the range 1 x 10(-4)-6 x 10(-3) mbar and substrate temperatures in the range 548-723 K. The variation of cathode potential of zinc target on the oxygen partial pressure was explained in terms of target poisoning effects. The stoichiometry of the films has improved with the increase in the oxygen partial pressure. The films were polycrystalline with wurtzite structure. The films formed at higher substrate temperatures were (002) oriented. The temperature dependence of Hall mobility of the filins formed at various substrate temperatures indicated that the grain boundary scattering of charge carriers was predominant electrical conduction mechanism in these films. The optical band gap of the films increased with the increase of substrate temperature. The ZnO films formed under optimized oxygen partial pressure of 1 x 10(-3) mbar and substrate temperature of 663 K exhibited low electrical resistivity of 6.9 x 10(-2) Omega cm, high visible optical transmittance of 83%, optical band gap of 3.28 eV and a figure of merit of 78 Omega(-1) cm(-1). (C) 2002 Published by Elsevier Science B.V.