共 12 条
[1]
[Anonymous], 2004, LECT NOTES NONLINEAR
[3]
Laser annealing for high-Q MEMS resonators
[J].
SMART SENSORS, ACTUATORS, AND MEMS, PTS 1 AND 2,
2003, 5116
:531-535
[4]
Nayfeh A.H., 1979, Nonlinear Oscillations
[5]
PAFFENROTH RC, 2002, AUTO 2000 CONTINUATI
[9]
Sarid D., 1994, SCANNING FORCE MICRO