Two-flat absolute test solutions based on pixel rotation averaging

被引：0
作者：
Sun, Wenqing [1 ]
Chen, Lei [1 ]
He, Yong [1 ]
Ri Hongzhu [1 ]
机构：
[1] Nanjing Univ Sci & Technol, Sch Elect Engn & Optoelect Tech, Nanjing 210094, Jiangsu, Peoples R China
来源：
6TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL TEST AND MEASUREMENT TECHNOLOGY AND EQUIPMENT | 2012年 / 8417卷
关键词：
interferometry; absolute testing; two-flat testing; pixel rotation averaging; OPTICAL-SURFACES;
D O I：
10.1117/12.975138
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Absolute testing is an important means of measuring the surface deviation with high precision. A novel method is proposed to approach solutions of the absolute surface 3-D distributions that based on the two-flat method. Measurement data are separated into even and odd part and the rotation averaging method is used to calculate the rotation variant part. The performance of this new method is evaluated by compared with the method in the literature. The maximum difference of peak to valley (PV) and root mean square (RMS) between the two methods are 2.3nm and 0.4nm, respectively. The advantage of this method is that it can obtain the surface information of the low and mid-spatial frequency. The repeatability error propagation of the proposed method is discussed.
引用
收藏
页数：7
相关论文
共 11 条
[1]  
Ai C., 1996, U. S. patent, Patent No. [5,502,566, 5502566]
[2]   ESTABLISHING A FLATNESS STANDARD [J].
ELSSNER, KE ;
VOGEL, A ;
GRZANNA, J ;
SCHULZ, G .
APPLIED OPTICS, 1994, 33 (13) :2437-2446
[3]   Absolute interferometric testing based on reconstruction of rotational shear [J].
Freischlad, KR .
APPLIED OPTICS, 2001, 40 (10) :1637-1648
[4]   Three-flat tests including mounting-induced deformations [J].
Griesmann, Ulf ;
Wang, Quandou ;
Soons, Johannes .
OPTICAL ENGINEERING, 2007, 46 (09)
[5]   Three-flat test solutions based on simple mirror symmetry [J].
Griesmann, Ulf .
APPLIED OPTICS, 2006, 45 (23) :5856-5865
[6]   ABSOLUTE TESTING OF FLATNESS STANDARDS AT SQUARE-GRID POINTS [J].
GRZANNA, J ;
SCHULZ, G .
OPTICS COMMUNICATIONS, 1990, 77 (2-3) :107-112
[7]   Pixel-based absolute topography test for three flats [J].
Parks, RE ;
Shao, LZ ;
Evans, CJ .
APPLIED OPTICS, 1998, 37 (25) :5951-5956
[8]   Absolute figure measurements with a liquid-flat reference [J].
Powell, I ;
Goulet, E .
APPLIED OPTICS, 1998, 37 (13) :2579-2588
[9]   Azimuthal position error correction algorithm for absolute test of large optical surfaces [J].
Rhee, Hyug-Gyo ;
Lee, Yun-Woo ;
Kim, Seung-Woo .
OPTICS EXPRESS, 2006, 14 (20) :9169-9177
[10]   HOMOGENEITY TESTING BY PHASE SAMPLING INTERFEROMETRY [J].
SCHWIDER, J ;
BUROW, R ;
ELSSNER, KE ;
SPOLACZYK, R ;
GRZANNA, J .
APPLIED OPTICS, 1985, 24 (18) :3059-3061
12