High-throughput rear-surface drilling of microchannels in glass based on electron dynamics control using femtosecond pulse trains

被引：68

作者：

Jiang, Lan ^{[1
]}

Liu, Pengjun ^{[1
]}

Yan, Xueliang ^{[1
]}

Leng, Ni ^{[1
]}

Xu, Chuancai ^{[1
]}

Xiao, Hai ^{[2
]}

Lu, Yongfeng ^{[3
]}

机构：

[1] Beijing Inst Technol, NanoMfg Fundamental Res Joint Lab Natl Sci Fdn Ch, Sch Mech Engn, Beijing 100081, Peoples R China

[2] Missouri Univ Sci & Technol, Dept Elect & Comp Engn, Rolla, MO 65409 USA

[3] Univ Nebraska, Dept Elect Engn, Lincoln, NE 68588 USA

来源：

OPTICS LETTERS | 2012年 / 37卷 / 14期

基金：

中国国家自然科学基金;

关键词：

LASER-PULSES; MICROFLUIDIC CHANNELS; FUSED-SILICA; FABRICATION; ABLATION; DIELECTRICS;

D O I：

10.1364/OL.37.002781

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This study proposes a rear-surface ablation enhancement approach to fabricate high-aspect-ratio microchannels by temporally shaping femtosecond laser pulse trains. In the case study of K9 glass, enhancements of up to a 56 times higher material removal rate and a three times greater maximum drilling depth are obtained by the proposed method, as compared with conventional femtosecond laser drilling at the same processing parameters. The improvements are due to the changes of photon-electron interactions by shaping femtosecond pulse train, which can effectively adjust the photon absorption and localized transient material properties by changing electron dynamics such as free electron densities. (c) 2012 Optical Society of America

引用

页码：2781 / 2783

页数：3

共 17 条

[1] Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching [J].

Bellouard, Y ;

Said, A ;

Dugan, M ;

Bado, P .

OPTICS EXPRESS, 2004, 12 (10) :2120-2129

[2] Ultrafast double-pulse ablation of fused silica [J].

Chowdhury, IH ;

Xu, XF ;

Weiner, AM .

APPLIED PHYSICS LETTERS, 2005, 86 (15) :1-3

[3] Time dynamics of burst-train filamentation assisted femtosecond laser machining in glasses [J].

Esser, Dagmar ;

Rezaei, Saeid ;

Li, Jianzhao ;

Herman, Peter R. ;

Gottmann, Jens .

OPTICS EXPRESS, 2011, 19 (25) :25632-25642

[4] Attosecond control and measurement: Lightwave electronics [J].

Goulielmakis, E. ;

Yakovlev, V. S. ;

Cavalieri, A. L. ;

Uiberacker, M. ;

Pervak, V. ;

Apolonski, A. ;

Kienberger, R. ;

Kleineberg, U. ;

Krausz, F. .

SCIENCE, 2007, 317 (5839) :769-775

[5] Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser [J].

He, Fei ;

Cheng, Ya ;

Xu, Zhizhan ;

Liao, Yang ;

Xu, Jian ;

Sun, Haiyi ;

Wang, Chen ;

Zhou, Zenghui ;

Sugioka, Koji ;

Midorikawa, Katsumi ;

Xu, Yonghao ;

Chen, Xianfeng .

OPTICS LETTERS, 2010, 35 (03) :282-284

[6] Attosecond pump probe: Exploring ultrafast electron motion inside an atom [J].

Hu, SX ;

Collins, LA .

PHYSICAL REVIEW LETTERS, 2006, 96 (07)

[7] Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass [J].

Hwang, DJ ;

Choi, TY ;

Grigoropoulos, CP .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (03) :605-612

[8] Plasma modeling for ultrashort pulse laser ablation of dielectrics [J].

Jiang, L. ;

Tsai, H. L. .

JOURNAL OF APPLIED PHYSICS, 2006, 100 (02)

[9] Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses [J].

Li, Y ;

Itoh, K ;

Watanabe, W ;

Yamada, K ;

Kuroda, D ;

Nishii, J ;

Jiang, YY .

OPTICS LETTERS, 2001, 26 (23) :1912-1914

[10] Fabrication of microfluidic devices in silica glass by water-assisted ablation with femtosecond laser pulses [J].

Li, Yan ;

Qu, Shiliang ;

Guo, Zhongyi .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, 21 (07)

← 1 2 →