Metal salt-derived In-Ga-Zn-O semiconductors incorporating formamide as a novel co-solvent for producing solution-processed, electrohydrodynamic-jet printed, high performance oxide transistors

被引:76
作者
Jeong, Sunho [1 ]
Lee, Ji-Yoon [1 ]
Lee, Sun Sook [1 ]
Seo, Yeong-Hui [1 ]
Kim, So-Yun [2 ]
Park, Jang-Ung [2 ]
Ryu, Beyong-Hwan [1 ]
Yang, Wooseok
Moon, Jooho [3 ]
Choi, Youngmin [1 ]
机构
[1] Korea Res Inst Chem Technol, Adv Mat Div, Taejon 305600, South Korea
[2] UNIST, Sch Mech & Adv Mat Engn, Sch NanoBiosci & Chem Engn, Low Dimens Carbon Mat Ctr, Ulsan 689798, South Korea
[3] Yonsei Univ, Dept Mat Sci & Engn, Seoul 120749, South Korea
基金
新加坡国家研究基金会;
关键词
THIN-FILM TRANSISTORS; LOW-TEMPERATURE FABRICATION; SOL-GEL; DOPED ZNO; ELECTRICAL CHARACTERISTICS; LOW-VOLTAGE; TRANSPARENT; DIELECTRICS; HYDROLYSIS; INSULATOR;
D O I
10.1039/c3tc30530a
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report the previously unrecognized co-solvent, formamide (FA), which can comprehensively improve both the device performance and bias stability of metal salt-derived, solution-processed In-Ga-Zn-O (IGZO) TFTs. By incorporating FA in IGZO precursor solutions, the chemical structures are tailored adequately for reducing the content of hydroxide and encouraging the oxygen vacancy formation, which has not been fulfilled in conventional chemical/physical approaches. Owing to such distinct chemical structural evolution, the field-effect mobility is enhanced dramatically by a factor of 4.3 (from 2.4 to 10.4 cm(2) V-1 s(-1)), and the threshold voltage shift during a positive-bias stress test is suppressed effectively by a factor of 2.3 (from 9.3 to 4.1 V) for unpassivated devices. The addition of formamide to IGZO precursor solutions also facilitates electrohydrodynamic-jet (e-jet) printability, with which the directly printed device with a channel width of similar to 30 mm is demonstrated successfully. In addition, a high performance, solution-processed IGZO transistor with a mobility of 50 cm(2) V-1 s(-1) is suggested through coupling a FA-added IGZO oxide semiconductor with a solution-processed zirconium aluminum oxide ((Zr,Al)(2)O-x) gate dielectric.
引用
收藏
页码:4236 / 4243
页数:8
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