Development of a Precision Micro-Assembly Machine for ICF Targets

The Precision Micro-Assembly Machine was developed to manufacture the ICF targets, which have submillimeter-sized components with micrometer sized features. The machine provides simultaneous manipulation of three objects in a 3-cm3 operating arena and can stitch together multiple millimeter-scales operating arenas over distances spanning tens of centimeters with micrometer-level accuracy. In this report, we will discuss the technologies that are merged to help assist the research community with micro-component fabrication. Furthermore, we also present the design of the online monitoring system, which contains two kinds of non-contact measurement system, microscopic image and laser confocal. The online monitoring system can characterize the positions of the target components during the assembly process. The effect and mathematic model of on-line measuring was analyzed. The results of target assembly experiments show position tolerance of the assembly is not more than 10 mu m.