A range-extended displacement sensor using a quartz tuning fork

被引：0

作者：

Lu, Yi ^{[1
]}

Cheng, Chiao-Hua ^{[1
]}

Chen, Li-Kang ^{[1
]}

Hung, Shao-Kang ^{[1
]}

机构：

[1] Natl Chiao Tung Univ, Dept Mech Engn, Hsinchu 300, Taiwan

来源：

2010 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM) | 2010年

关键词：

MICROSCOPY; CANTILEVER;

D O I：

暂无

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

A quartz tuning fork is a kind of piezoelectric resonators. Quartz tuning forks can be modified as sensors to measure various properties, such as force, acceleration, displacement, and many other ones. A method to extend the measurable range of a quartz tuning fork based displacement sensor is devised in this paper. The experimental results demonstrate that the linear measurable range of the proposed displacement sensor is 17.6 mu m.

引用

页数：4

共 14 条

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