A 252-V/lux.s, 16.7-Million-Frames-Per-Second 312-kpixel Back-Side-Illuminated Ultrahigh-Speed Charge-Coupled Device

被引：15

作者：

Arai, Toshiki ^{[1
]}

Yonai, Jun ^{[1
]}

Hayashida, Tetsuya ^{[1
]}

Ohtake, Hiroshi ^{[1
]}

van Kuijk, Harry ^{[2
]}

Etoh, Takeharu Goji ^{[3
]}

机构：

[1] NHK Sci & Technol Res Labs, Tokyo 1578510, Japan

[2] Teledyne DALSA Profess Imaging, NL-5656 AE Eindhoven, Netherlands

[3] Ritsumeikan Univ, Kusatsu, Shiga 5258577, Japan

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 2013年 / 60卷 / 10期

关键词：

Back-side-illuminated (BSI); high-sensitivity; image sensor; ultrahigh-speed charge-coupled device (CCD); IMAGE SENSOR; FRAMES;

D O I：

10.1109/TED.2013.2276005

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We developed a 312-kpixel back-side-illuminated ultrahigh-speed charge-coupled device (CCD) that has a sensitivity of 252 V/lux . s and is capable of operating at 16.7 Mfps. The potential profile of the pixel was designed by using a 3-D semiconductor device simulator. The high sensitivity results from the unit having fill factor and time aperture ratios of 100% and a high optical utilization ratio. Its sensitivity is 12.7 times that of a front-side-illuminated image sensor. Ultrahigh-speed shooting was enabled by an in situ storage image sensor. By reducing the wiring resistance and dividing the image area into eight blocks, a maximum frame rate of 16.7 Mfps was attained. The total pixel count is 760 horizontally and 411 vertically. The burst capturing speed is thus 5.2 Tpixel/s, making it the fastest imaging device to date.

引用

页码：3450 / 3458

页数：9

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