AlxGa1-xN (0<=x<=1) ultraviolet photodetectors grown on sapphire by metal-organic chemical-vapor deposition.

被引:128
作者
Walker, D [1 ]
Zhang, X [1 ]
Saxler, A [1 ]
Kung, P [1 ]
Xu, J [1 ]
Razeghi, M [1 ]
机构
[1] USAF,WRIGHT LAB,MAT DIRECTORATE,WRIGHT PATTERSON AFB,OH 45433
关键词
D O I
10.1063/1.118450
中图分类号
O59 [应用物理学];
学科分类号
摘要
AlxGa1-xN (0 less than or equal to x less than or equal to 1) ultraviolet photoconductors with cutoff wavelengths from 365 to 200 nm have been fabricated and characterized. The maximum detectivity reached 5.5 x 10(8) cmHz(1/2)/W at a modulating frequency of 14 Hz. The effective majority carrier lifetime in AlxGa1-xN materials, derived from frequency-dependent photoconductivity measurements, has been estimated to be from 6 to 35 ms. The frequency-dependent noise spectrum shows that it is dominated by Johnson noise at high frequencies for low-Al-composition samples. (C) 1997 American Institute of Physics.
引用
收藏
页码:949 / 951
页数:3
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