Spectroscopic measurement of absorptive thin films by Spectral-Domain Optical Coherence Tomography

被引：5

作者：

Ho, Tuan-Shu ^{[1
]}

Yeh, Pochi ^{[2
]}

Tsai, Cheng-Chung ^{[1
]}

Hsu, Kuang-Yu ^{[1
]}

Huang, Sheng-Lung ^{[1
,3
]}

机构：

[1] Natl Taiwan Univ, Grad Inst Photon & Optoelect, Taipei 106, Taiwan

[2] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA

[3] Natl Taiwan Univ, Dept Elect Engn, Taipei 106, Taiwan

来源：

OPTICS EXPRESS | 2014年 / 22卷 / 05期

关键词：

REFRACTIVE-INDEX; THICKNESS MEASUREMENT; INTERFEROMETRY; ELLIPSOMETRY; MICROSCOPY;

D O I：

10.1364/OE.22.005675

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A non-invasive method for measuring the refractive index, extinction coefficient and film thickness of absorptive thin films using spectral-domain optical coherent tomography is proposed, analyzed and experimentally demonstrated. Such an optical system employing a normal-incident beam of light exhibits a high spatial resolution. There are no mechanical moving parts involved for the measurement except the transversal scanning module for the measurement at various transversal locations. The method was experimentally demonstrated on two absorptive thin-film samples coated on transparent glass substrates. The refractive index and extinction coefficient spectra from 510 to 580 nm wavelength range and film thickness were simultaneously measured. The results are presented and discussed. (C) 2014 Optical Society of America

引用

页码：5675 / 5683

页数：9

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