Dynamical Diffractometry of Defects and Strains in Gd3Ga5O12 Garnet Crystals After Implantation with F+ Ions

被引:0
作者
Skakunova, O. S. [1 ]
Pylypiv, V. M.
Vladimirova, T. P.
Olikhovskii, S. I.
Molodkin, V. B.
Ostafiychuk, B. K.
Kislovskii, E. M.
Reshetnyk, O. V.
Lizunova, S. V.
机构
[1] Natl Acad Sci Ukraine, GV Kurdyumov Inst Metallophys, UA-03680 Kiev, Ukraine
来源
METALLOFIZIKA I NOVEISHIE TEKHNOLOGII | 2013年 / 35卷 / 12期
关键词
X-RAY; FILMS; LAYERS;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
By the method of high-resolution X-ray diffractometry, the rocking curves (RCs) are measured from the gadolinium gallium garnet single crystals Gd3Ga5O12, which were implanted with different doses of the 90 keV F+ ions. Analysis of the measured RCs is carried out by using the theoretical model of dynamical X-ray diffraction in crystals with inhomogeneous distribution of defects. Consequently, the parameters of strain profile and characteristics of structural defects in implanted layer and crystal bulk of the investigated samples are determined.
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页码:1595 / 1608
页数:14
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