Generalized phase-shifting interferometry by parameter estimation with the least squares method

被引:55
作者
Juarez-Salazar, Rigoberto [1 ]
Robledo-Sanchez, Carlos [1 ]
Meneses-Fabian, Cruz [1 ]
Guerrero-Sanchez, Fermin [1 ]
Arevalo Aguilar, L. M. [1 ]
机构
[1] Benemerita Univ Autonoma Puebla, Fac Ciencias Fis Matemat, Puebla 72000, Mexico
关键词
Interferometry; Phase measurement; Fringe analysis; FRINGE-PATTERN-ANALYSIS; WINDOWED FOURIER-TRANSFORM; EXTRACTION; ALGORITHM; NORMALIZATION; INTERFEROGRAMS; REDUCTION;
D O I
10.1016/j.optlaseng.2012.12.020
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A simple non-iterative algorithm for generalized phase-shifting interferometry is proposed. This algorithm recovers the wrapped phase from two or more interferograms with unknown phase steps between 0 and pi rad. The proposal is based on the least squares method to calculate four parameters: background and modulation light, phase steps and wrapped phase distribution. This algorithm, by a new interferogram normalization procedure, can handle interferograms with variable spatiotemporal visibility overcoming the restriction and drawbacks from usual variable spatial visibility approaches. The algorithm works very well for processing interferograms which include many fringes. This behaviour will be explicated and discussed. The effectiveness and robustness of this algorithm are supported by numerical simulation and by the evaluation of experimental interferograms. The phase-shift estimation quality is verified by two different techniques. By the properties of this algorithm, such as the low computing time and free of user intervention, we believe it could be used in automatic real-time applications. (C) 2013 Elsevier Ltd. All rights reserved.
引用
收藏
页码:626 / 632
页数:7
相关论文
共 41 条
[1]  
[Anonymous], 2005, Matlab guide
[2]   Normalization of fringe patterns using the bidimensional empirical mode decomposition and the Hilbert transform [J].
Bernini, Maria B. ;
Federico, Alejandro ;
Kaufmann, Guillermo H. .
APPLIED OPTICS, 2009, 48 (36) :6862-6869
[3]   DIGITAL WAVEFRONT MEASURING INTERFEROMETER FOR TESTING OPTICAL SURFACES AND LENSES [J].
BRUNING, JH ;
HERRIOTT, DR ;
GALLAGHER, JE ;
ROSENFELD, DP ;
WHITE, AD ;
BRANGACCIO, DJ .
APPLIED OPTICS, 1974, 13 (11) :2693-2703
[4]   Generalized phase-shifting interferometry with arbitrary unknown phase steps for diffraction objects [J].
Cai, LZ ;
Liu, Q ;
Yang, XL .
OPTICS LETTERS, 2004, 29 (02) :183-185
[5]  
Carre P., 1966, METROLOGIA, V2
[6]   Phase-shifting interferometry with uncalibrated phase shifts [J].
Chen, X ;
Gramaglia, M ;
Yeazell, JA .
APPLIED OPTICS, 2000, 39 (04) :585-591
[7]  
Creath K., 1988, Progress in optics. Vol.XXVI, P349, DOI 10.1016/S0079-6638(08)70178-1
[8]   Suppressing phase errors from vibration in phase-shifting interferometry [J].
Deck, Leslie L. .
APPLIED OPTICS, 2009, 48 (20) :3948-3960
[9]   PHASE STEP MEASUREMENT AND VARIABLE STEP ALGORITHMS IN PHASE-SHIFTING INTERFEROMETRY [J].
FARRELL, CT ;
PLAYER, MA .
MEASUREMENT SCIENCE AND TECHNOLOGY, 1992, 3 (10) :953-958
[10]   PHASE-STEP INSENSITIVE ALGORITHMS FOR PHASE-SHIFTING INTERFEROMETRY [J].
FARRELL, CT ;
PLAYER, MA .
MEASUREMENT SCIENCE AND TECHNOLOGY, 1994, 5 (06) :648-652