共 31 条
[13]
Passivation of Al/Si interface by chemical treatment:: Schottky barrier height and plasma etch induced defects
[J].
GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY,
2002, 82-84
:255-258
[16]
Jonscher A. K., 1972, Journal of Non-Crystalline Solids, V8-10, P293, DOI 10.1016/0022-3093(72)90151-2
[19]
NICOLLIAN EH, 1967, BELL SYST TECH J, V46, P46