Electromechanical analysis of electrostatic nano-actuators using the differential quadrature method

被引：18

作者：

Hsu, Ming-Hung ^{[1
]}

机构：

[1] Natl Penghu Univ, Dept Elect Engn, Penghu, Taiwan

来源：

COMMUNICATIONS IN NUMERICAL METHODS IN ENGINEERING | 2008年 / 24卷 / 11期

关键词：

nanoelectromechanical system; differential quadrature method; nano-actuator; pull-in; electrostatic; nanomechanical behavior;

D O I：

10.1002/cnm.1043

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The nonlinear analysis of nanoelectromechanical systems using the differential quadrature model is investigated. The differential quadrature method is applied to overcome the difficulty of determining the nonlinear equation of motion. The characteristics of various combinations of curved electrodes and cantilever beams are considered to optimize the design. Various nano-actuators, such as the cantilever beam actuator, are derived and simulated to examine the feasibility of applying the differential quadrature method to the nonlinear deflection in solving the nano-actuator problem. The effects of the electrode shapes, the lengths of the actuators, and the moments of inertia of the actuators on the pull-in behavior of the cantilever actuators in electrostatic nanoelectromechanical systems are investigated. The differential quadrature approach is used to generate the electrostatic field equations in matrix form. Copyright (C) 2007 John Wiley & Sons, Ltd.

引用

页码：1445 / 1457

页数：13

共 52 条

[1]

Bert C.W., 1996, APPL MECH REV, V49, P1, DOI DOI 10.1115/1.3101882

[2] Nanotube devices: A microscopic model [J].

Bulashevich, KA ;

Rotkin, SV .

JETP LETTERS, 2002, 75 (04) :205-209

[3] Characterization of contact electromechanics through capacitance-voltage measurements and simulations [J].

Chan, EK ;

Garikipati, K ;

Dutton, RW .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1999, 8 (02) :208-217

[4] Computational study of variations in gap size for the electrostatic levitating force of MEMS device using dual BEM [J].

Chyuan, SW ;

Liao, YS ;

Chen, JT .

MICROELECTRONICS JOURNAL, 2004, 35 (09) :739-748

[5]

Chyuan SW, 2003, COMPUT SCI ENG, V5, P52, DOI 10.1109/MCISE.2003.1196307

[6] Exact and approximate dynamic analysis of circular arches using DQM [J].

De Rosa, MA ;

Franciosi, C .

INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2000, 37 (08) :1103-1117

[7]

DREXLER KE, 1992, NANOSYSTEMS

[8] Generalized differential quadrature method for buckling analysis [J].

Du, H ;

Liew, KM ;

Lim, MK .

JOURNAL OF ENGINEERING MECHANICS, 1996, 122 (02) :95-100

[9]

Elwenspoek M., 1995, 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Digest of Technical Papers (IEEE Cat. No.95TH8173), P412

[10]

Feng Y., 1992, NONLINEAR DYNAM, V3, P13, DOI DOI 10.1007/BF00045468

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