Over-range capacity of a piezoresistive microaccelerometer

被引：28

作者：

Chen, H ^{[1
]}

Shen, SQ ^{[1
]}

Bao, MH ^{[1
]}

机构：

[1] FUDAN UNIV,DEPT ELECT ENGN,SHANGHAI 200433,PEOPLES R CHINA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 58卷 / 03期

基金：

中国国家自然科学基金;

关键词：

microaccelerometers; over-range capacity; piezoresistance;

D O I：

10.1016/S0924-4247(97)01393-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Over-range capacity is one of the most important parameters for an accelerometer. Over-range protection has been provided for commercially available micromechanical piezoresistive accelerometers to make them practical for applications. Described in this paper is an extensive analysis an the over-range protection capability for a cantilever beam accelerometer. Also analysed in the paper is the acceleration of a laboratory testing system using a drop hammer scheme for shock accelerations. Based on the theoretical analyses and experimental data, the system has been calibrated and used to provide shock accelerations for experimental testing in the laboratory.

引用

页码：197 / 201

页数：5