Solid-State Dewetting of Thin Films

被引:960
作者
Thompson, Carl V. [1 ]
机构
[1] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
来源
ANNUAL REVIEW OF MATERIALS RESEARCH, VOL 42 | 2012年 / 42卷
关键词
hole formation; hole growth; film stability; agglomeration; surface energy; templated self-assembly; SURFACE SELF-DIFFUSION; CAPILLARY INSTABILITIES; THERMAL AGGLOMERATION; GRAIN-GROWTH; STEP EDGES; FACETING INSTABILITY; EQUILIBRIUM SHAPE; QUANTUM DOTS; STABILITY; CRYSTAL;
D O I
10.1146/annurev-matsci-070511-155048
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Solid films are usually metastable or unstable in the as-deposited state, and they will dewet or agglomerate to form islands when heated to sufficiently high temperatures. This process is driven by surface energy minimization and can occur via surface diffusion well below a film's melting temperature, especially when the film is very thin. Dewetting during processing of films for use in micro- and nanosystems is often undesirable, and means of avoiding dewetting are important in this context. However, dewetting can also be useful in making arrays of nanoscale particles for electronic and photonic devices and for catalyzing growth of nanotubes and nanowires. Templating of dewetting using patterned surface topography or prepatterning of films can be used to create ordered arrays of particles and complex patterns of partially dewetted structures. Studies of dewetting can also provide fundamental new insight into the effects of surface energy anisotropy and facets on shape evolution.
引用
收藏
页码:399 / 434
页数:36
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