Highly compact and easy-to-use optical chip interferometer with picometric performances

被引：3

作者：

Merzouk, W. A. ^{[1
]}

Cagneau, B. ^{[1
]}

Gardillou, F. ^{[2
]}

Hilouane, K. ^{[1
]}

Chassagne, L. ^{[1
]}

机构：

[1] Univ Versailles, LISV, 10-12 Ave Europe, F-78140 Velizy Villacoublay, France

[2] Teemphotonics, 61 Chemin Vieux Chene, F-38240 Meylan, France

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2016年 / 87卷 / 10期

关键词：

SCANNING FORCE MICROSCOPE; DISPLACEMENT SENSOR; NANOMETER RESOLUTION; BEAM DEFLECTION; LONG-RANGE; FIBER; ACCURACY; AMPLITUDE; SCALE;

D O I：

10.1063/1.4963899

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In this paper, we present a compact, inexpensive, and easy-to-use optical chip interferometer based on the telecom integrated waveguide technology. The measurement evaluation is focused on the resolution and the noise level of the sensor. The power spectral density of 100 fm Hz(-1/2) @ 10 kHz is reached in static conditions. The same level is obtained with the standard Allan deviation for both short and long term measurements. Dynamic performances are also evaluated with sub-nanometer measurements made with piezoelectric systems. The potential bandwidth of the sensor is very high and is currently only limited by electronics (250 kHz). Published by AIP Publishing.

引用

页数：7

共 39 条

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