Alumina Ceramic Based High-Temperature Performance of Wireless Passive Pressure Sensor

被引：2

作者：

Wang, Bo ^{[1
]}

Wu, Guozhu ^{[2
,3
]}

Guo, Tao ^{[2
,3
]}

Tan, Qiulin ^{[2
,3
]}

机构：

[1] North Univ China, Sch Comp Sci & Control Engn, Taiyuan 030051, Peoples R China

[2] North Univ China, Minist Educ, Key Lab Instrumentat Sci & Dynam Measurement, Taiyuan 030051, Peoples R China

[3] North Univ China, Sci & Technol Elect Test & Measurement Lab, Taiyuan 030051, Peoples R China

来源：

PHOTONIC SENSORS | 2016年 / 6卷 / 04期

基金：

中国国家自然科学基金;

关键词：

Pressure sensor; wireless passive; high temperature; zero drift; resonant frequency; DESIGN;

D O I：

10.1007/s13320-016-0313-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A wireless passive pressure sensor equivalent to inductive-capacitive (LC) resonance circuit and based on alumina ceramic is fabricated by using high temperature sintering ceramic and post-fire metallization processes. Cylindrical copper spiral reader antenna and insulation layer are designed to realize the wireless measurement for the sensor in high temperature environment. The high temperature performance of the sensor is analyzed and discussed by studying the phase-frequency and amplitude-frequency characteristics of reader antenna. The average frequency change of sensor is 0.68 kHz/degrees C when the temperature changes from 27 degrees C to 700 degrees C and the relative change of twice measurements is 2.12%, with high characteristic of repeatability. The study of temperature-drift characteristic of pressure sensor in high temperature environment lays a good basis for the temperature compensation methods and insures the pressure signal readout accurately.

引用

页码：328 / 332

页数：5

共 16 条

[1] Wireless Surface Acoustic Wave Pressure and Temperature Sensor With Unique Identification Based on LiNbO3 [J].

Binder, Alfred ;

Bruckner, Gudrun ;

Schobernig, Norbert ;

Schmitt, Daniel .

IEEE SENSORS JOURNAL, 2013, 13 (05) :1801-1805

[2] A Minimally Invasive Implantable Wireless Pressure Sensor for Continuous IOP Monitoring [J].

Chitnis, Girish ;

Maleki, Teimour ;

Samuels, Brian ;

Cantor, Louis B. ;

Ziaie, Babak .

IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 2013, 60 (01) :250-256

[3] Ultrafast femtosecond-laser-induced fiber Bragg gratings in air-hole microstructured fibers for high-temperature pressure sensing [J].

Jewart, Charles M. ;

Wang, Qingqing ;

Canning, John ;

Grobnic, Dan ;

Mihailov, Stephen J. ;

Chen, Kevin P. .

OPTICS LETTERS, 2010, 35 (09) :1443-1445

[4] The changing automotive environment: High-temperature electronics [J].

Johnson, RW ;

Evans, JL ;

Jacobsen, P ;

Thompson, JRR ;

Christopher, M .

IEEE TRANSACTIONS ON ELECTRONICS PACKAGING MANUFACTURING, 2004, 27 (03) :164-176

[5] Electromechanical Computing at 500°C with Silicon Carbide [J].

Lee, Te-Hao ;

Bhunia, Swarup ;

Mehregany, Mehran .

SCIENCE, 2010, 329 (5997) :1316-1318

[6]

Li S., 2015, J SEMICONDUCTORS, V36

[7]

Mills D. A., 2014, SPIE, V9113

[8] Computer aided modelling and diaphragm design approach for high sensitivity silicon-on-insulator pressure sensors [J].

Narayanaswamy, M. ;

Daniel, R. Joseph ;

Sumangala, K. ;

Jeyasehar, C. Antony .

MEASUREMENT, 2011, 44 (10) :1924-1936

[9] Design and application of a wireless, passive, resonant-circuit environmental monitoring sensor [J].

Ong, KG ;

Grimes, CA ;

Robbins, CL ;

Singh, RS .

SENSORS AND ACTUATORS A-PHYSICAL, 2001, 93 (01) :33-43

[10]

Pulliam W., 2002, Proceedings of the SPIE - The International Society for Optical Engineering, V4578, P229, DOI 10.1117/12.456079

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