Series resistance method to obtain equivalent circuit of piezoelectric resonator

被引：1

作者：

Zheng, F. ^{[1
]}

Wu, X. S. ^{[1
]}

He, Y. S. ^{[1
]}

Chen, W. Y. ^{[1
]}

Zhang, W. P. ^{[1
]}

Cui, F. ^{[1
]}

Liu, W. ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Nano Micro Fabricat Te, Res Inst Micro Nano Sci & Technol, Shanghai, Peoples R China

来源：

ELECTRONICS LETTERS | 2012年 / 48卷 / 17期

关键词：

D O I：

10.1049/el.2012.1909

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The series resistance method (SRM) is introduced to obtain an equivalent circuit of a piezoelectric micro resonator. This method uses two series resistances respectively connected to driving electrodes of the resonator, and then detects the voltage amplitudes at the terminals of the series resistances and phase difference between them. Compared with the results of the impedance analyser, the deviations of resonance frequency, motional capacitance (C-1), motional inductance (L-1) of the SRM are 0.213%, 7.48%, and 7.62%, respectively. The SRM is easy to be realised in the laboratory. To a certain extent, it can replace the impedance analyser to attain the equivalent parameters of the piezoelectric micro resonator.

引用

页码：1054 / 1055

页数：2