Size reduction of tunable micromachined filters for fast wavelength tuning

被引：2
|
作者：
Amano, T [1 ]
Hino, T [1 ]
Janto, W [1 ]
Ar'ai, M [1 ]
Koyama, F [1 ]
机构：
[1] Tokyo Inst Technol, P&I Labs, Microsyst Res Ctr, Midori Ku, Yokohama, Kanagawa 2268503, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2004年 / 43卷 / 2A期
关键词：
optical MEMS; tunable filter; cantilever; high speed; air gap;
D O I：
10.1143/JJAP.43.L157
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We present the design and fabrication of a micromachined GaAs/AlGaAs filter for fast wavelength tuning. The size reduction of tunable micromachined filters is carried out to increase the speed of wavelength tuning. We fabricated micromachined filters having a miniature filter structure with an air gap of 300 nm and a short cantilever of 45 pm length, and exhibiting a fast response time of below 2.5 mus.
引用
收藏
页码：L157 / L159
页数：3
相关论文
共 50 条
  • [41] Fast Lasing Wavelength Tuning in Single Nanowires
    Xu, Peizhen
    Gong, Jue
    Guo, Xin
    Xin, Chenguang
    Wu, Hao
    Qing, Peng
    Lin, Xing
    Fang, Wei
    Di, Dawei
    Tong, Limin
    ADVANCED OPTICAL MATERIALS, 2019, 7 (20):
  • [42] Fast Wavelength-Tunable Lasers on Silicon
    Dhoore, Soren
    Roelkens, Gunther
    Morthier, Geert
    IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2019, 25 (06)
  • [43] Electronic Wavelength Tuning of Tunable Laser with Acousto-Optic Tunable Filter
    Yumoto, Masaki
    Maeda, Yasuhiro
    Saito, Norihito
    Ogawa, Takayo
    Yamashita, Masafumi
    Wada, Satoshi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (11) : 8411 - 8415
  • [44] Micromachined porous silicon Fabry-Perot long wavelength infrared filters
    Afandi, Yaman
    Parish, Gia
    Keating, Adrian
    SENSORS AND ACTUATORS A-PHYSICAL, 2021, 332
  • [45] Wavelength tuning of double-cavity micromachined filter with electrical and thermal actuations
    Janto, Wiganes
    Matsutani, Akihiro
    Koyama, Fumio
    OPTICAL REVIEW, 2007, 14 (02) : 86 - 90
  • [46] Wavelength Tuning of Double-Cavity Micromachined Filter with Electrical and Thermal Actuations
    Wiganes Janto
    Akihiro Matsutani
    Fumio Koyama
    Optical Review, 2007, 14 : 86 - 90
  • [47] Tunable V-Cavity Laser with Butt-Joint Passive Tuning Section for Fast Wavelength Switching
    Liao, Xiaolu
    Guo, Jia
    He, Jian-Jun
    IEEE PHOTONICS JOURNAL, 2017, 9 (04):
  • [48] Surface micromachined GHz tunable capacitor with 14:1 continuous tuning range
    Lee, Chuang-Yuan
    Chen, Shih-Jui
    Chi, Derrick
    Yu, Hongyu
    Kim, Eun Sok
    MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, : 1008 - 1011
  • [49] Dynamic response of thermally tunable micromachined optical filter with low tuning voltage
    Amano, T
    Hino, T
    Koyama, F
    Arai, M
    Matsutani, A
    2002 IEEE/LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2, 2002, : 829 - 830
  • [50] TIME AND WAVELENGTH-DIVISION MULTIACCESS WITH ACOUSTOOPTIC TUNABLE FILTERS
    KOVACEVIC, M
    GERLA, M
    BANNISTER, J
    FIBER AND INTEGRATED OPTICS, 1993, 12 (02) : 113 - 132
12345