Size reduction of tunable micromachined filters for fast wavelength tuning

被引：2
|
作者：
Amano, T [1 ]
Hino, T [1 ]
Janto, W [1 ]
Ar'ai, M [1 ]
Koyama, F [1 ]
机构：
[1] Tokyo Inst Technol, P&I Labs, Microsyst Res Ctr, Midori Ku, Yokohama, Kanagawa 2268503, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2004年 / 43卷 / 2A期
关键词：
optical MEMS; tunable filter; cantilever; high speed; air gap;
D O I：
10.1143/JJAP.43.L157
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We present the design and fabrication of a micromachined GaAs/AlGaAs filter for fast wavelength tuning. The size reduction of tunable micromachined filters is carried out to increase the speed of wavelength tuning. We fabricated micromachined filters having a miniature filter structure with an air gap of 300 nm and a short cantilever of 45 pm length, and exhibiting a fast response time of below 2.5 mus.
引用
收藏
页码：L157 / L159
页数：3
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