Nanolithographic self-assembly of colloidal nanoparticles

被引:7
|
作者
Moshnikov, V. A. [1 ,2 ]
Maksimov, A. I. [1 ]
Aleksandrova, O. A. [1 ]
Pronin, I. A. [1 ,3 ]
Karmanov, A. A. [3 ]
Terukov, E. I. [1 ,4 ]
Yakushova, N. D. [3 ]
Averin, I. A. [3 ]
Bobkov, A. A. [1 ]
Permyakov, N. V. [1 ]
机构
[1] St Petersburg State Electrotech Univ LETI, St Petersburg 197376, Russia
[2] Peter Great St Petersburg Polytech Univ, St Petersburg 195251, Russia
[3] Penza State Univ, Penza 440026, Russia
[4] Russian Acad Sci, Ioffe Phys Tech Inst, St Petersburg 194021, Russia
基金
俄罗斯基础研究基金会; 俄罗斯科学基金会;
关键词
FILMS; ADSORPTION; SILICON;
D O I
10.1134/S1063785016090236
中图分类号
O59 [应用物理学];
学科分类号
摘要
Methods of nanolithographic self-assembly of colloidal nanoparticles have been created, which are promising for the development of fractal nanolithography.
引用
收藏
页码:967 / 969
页数:3
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