Bending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragm

被引：14

作者：

Wang, Zhihong ^{[1
]}

Yao, Yingbang ^{[1
]}

Wang, Xianbin ^{[1
]}

Yue, Weisheng ^{[1
]}

Chen, Longqing ^{[1
]}

Zhang, Xi Xiang ^{[1
]}

机构：

[1] King Abdullah Univ Sci & Technol, Adv Nanofabricat Core Lab, Thuwal 239556900, Saudi Arabia

来源：

SCIENTIFIC REPORTS | 2013年 / 3卷

关键词：

LEAD-ZIRCONATE-TITANATE; FLEXOELECTRIC POLARIZATION; ELECTRIC POLARIZATION; FERROELECTRICITY;

D O I：

10.1038/srep03127

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

We investigated the dependence of electromechanical coupling and the piezoelectric response of a micromachined Pb(Zr0.52Ti0.48)O-3 (PZT) diaphragm on its curvature by observing the impedance spectrum and central deflection responses to a small AC voltage. The curvature of the diaphragm was controlled by applying air pressure to its back. We found that a depolarized flat diaphragm does not initially exhibit electromechanical coupling or the piezoelectric response. However, upon the application of static air pressure to the diaphragm, both electromechanical coupling and the piezoelectric response can be induced in the originally depolarized diaphragm. The piezoelectric response increases as the curvature increases and a giant piezoelectric response can be obtained from a bent diaphragm. The obtained results clearly demonstrate that a high strain gradient in a diaphragm can polarize a PZT film through a flexoelectric effect, and that the induced piezoelectric response of the diaphragm can be controlled by adjusting its curvature.

引用

页数：8

共 29 条

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