One-dimensional structure of boron nitride on chromium (110) - a study of the growth of boron nitride by chemical vapour deposition of borazine

被引:42
作者
Mueller, Frank [1 ,2 ]
Huefner, Stefan [2 ]
Sachdev, Hermann [1 ]
机构
[1] Univ Saarland, Inst Anorgan Chem, Nat Wissenschaftlich Tech Fak Chem Pharm & Werkst, D-66041 Saarbrucken, Germany
[2] Univ Saarland, Inst Expt Phys, Nat Wissenschaftlich Tech Fak Phys & Mechatron 2, D-66041 Saarbrucken, Germany
关键词
Boron nitride; Chromium; Low energy electron diffraction (LEED); X-ray photoelectron spectroscopy (XPS); X-ray photoelectron diffraction (XPD); Chemical vapour deposition (CVD);
D O I
10.1016/j.susc.2008.06.037
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The nucleation and growth of boron nitride films on a chromium (110) surface by thermal decomposition of borazine (HBNH)(3) was investigated by low energy electron diffraction (LEED), X-ray photoelectron spectroscopy (XPS) and X-ray photoelectron diffraction (XPD). The boron nitride film forms a chemically non-uniform one-dimensional superstructure with short range order along the [1 (1) over bar0] direction and long range order along [001]. Moreover, the thermal stability of the resulting BN film was investigated and a chemical reaction with the substrate was observed leading to the formation of Cr-B- and Cr-N- bonds at the interface and indicating the onset of the formation of hard boride and nitride phases in the system CrB-N. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:3467 / 3476
页数:10
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