Electron beam direct write polymeric optical waveguides

被引：0

作者：

Wong, WH ^{[1
]}

Pun, EYB ^{[1
]}

机构：

[1] City Univ Hong Kong, Dept Elect Engn, Optoelect Res Ctr, Kowloon, Hong Kong, Peoples R China

来源：

MATERIALS AND DEVICES FOR PHOTONIC CIRCUITS II | 2001年 / 4453卷

关键词：

optical waveguide; polymer; electron beam lithography;

D O I：

10.1117/12.447639

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Polymeric single mode optical waveguides based on a new kind of negative tone epoxy novolak resin (ENR) polymer have been fabricated using electron beam direct writing. This polymer has a high refractive index, high sensitivity and high glass transition temperature (Tg). Constrast curves and saturation dosages of the polymer on different substrate materials were obtained, and the sensitivity of ENR is found to be over a hundred times larger than that of Polymethyl-methacrylate (PMMA). For single mode channel waveguides with upper claddings, the propagation losses measured were 0.22dB/cm and 0.48dB/cm at 1330nm and 1550nm for TM mode, and 0.9dB/cm and 1.2dB/cm for TE mode, respectively.

引用

页码：100 / 105

页数：6

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