Morphology control of thin LiCoO2 films fabricated using the electrostatic spray deposition (ESD) technique

被引：238

作者：

Chen, CH

Kelder, EM

vanderPut, PJJM

Schoonman, J

机构：

[1] Laboratory for Applied Inorganic Chemistry, Delft University of Technology, 2628 BL Delft

来源：

JOURNAL OF MATERIALS CHEMISTRY | 1996年 / 6卷 / 05期

关键词：

D O I：

10.1039/jm9960600765

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Electrostatic spray deposition (ESD) is a technique recently developed for the fabrication of inorganic thin films. Several process steps involved in an ESD process are overviewed. A variety of surface morphologies of LiCoO2 thin layers fabricated by this technique are presented, indicating correlations between the morphologies and deposition conditions.

引用

页码：765 / 771

页数：7

共 20 条

[1] INSTABILITY OF EVAPORATING CHARGED DROPS [J].