SEU-sensitive volumes in bulk and SOISRAMs from first-principles calculations and experiments

Large-scale three-dimensional (3-D) device simulations, focused ion microscopy, and broadbeam heavy-ion experiments are used to determine and compare the SEU-sensitive volumes of bulk-Si and SOI CMOS SRAMs. Single-event upset maps and cross-section curves calculated directly from 3-D simulations show excellent agreement with broadbeam cross section curves and microbeam charge collection and upset images for 16 K bulk-Si SRAMs. Charge-collection and single-event upset (SEU) experiments on 64 K and 1 M SOI SRAMs indicate that drain strikes can cause single-event upsets in SOI ICs. 3-D simulations do not predict this result, which appears to be due to anomalous charge collection from the substrate through the buried oxide. This substrate charge-collection mechanism can considerably increase the SEU-sensitive volume of SOI SRAMs, and must be included in single-event models if they are to provide accurate predictions of SOI device response in radiation environments.