Hard X-ray Imaging Microscopy using X-ray Guide Tube as Beam Condenser for Field Illumination

被引：5

作者：

Suzuki, Yoshio ^{[1
]}

Takeuchi, Akihisa ^{[1
]}

Uesugi, Kentaro ^{[1
]}

Terada, Yasuko ^{[1
]}

Nakazawa, Hiromoto

Ohzawa, Sumito

Aoyama, Tomoki

Nii, Hajime

Handa, Katsumi

机构：

[1] JASRI SPring 8, Sayo, Hyogo 6795198, Japan

来源：

11TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY (XRM2012) | 2013年 / 463卷

关键词：

DIFFRACTION;

D O I：

10.1088/1742-6596/463/1/012028

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

An optical system for illumination of object in x-ray imaging microscopy is developed. The optical system is a beam condenser consisting of a single-bounce conical-shape mono-capillary (x-ray guide tube: XGT) made of Pyrex glass. The XGT condenser was tested at the beam line 47XU of SPring-8 using a Fresnel zone plate as an objective lens. Comparing with the microscope without beam condenser, the flux density is improved by a factor of 12-20 in the x-ray energy range of 6-8 keV. Test patterns with a 50 nm-structure are clearly resolved at 8 keV with an exposure time less than 1 s.

引用

页数：4

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