InAs Nanowire Circuits Fabricated by Field-Assisted Self-Assembly on a Host Substrate

被引:8
作者
Blekker, Kai [1 ]
Richter, Rene [1 ]
Oda, Ryosuke [2 ]
Taniyama, Satoshi [2 ]
Benner, Oliver [1 ]
Keller, Gregor [1 ]
Muenstermann, Benjamin [1 ]
Lysov, Andrey [1 ]
Regolin, Ingo [1 ]
Waho, Takao [2 ]
Prost, Werner [1 ]
机构
[1] Univ Duisburg Essen, Dept Solid State Elect, D-47057 Duisburg, Germany
[2] Sophia Univ, Dept Elect & Elect Engn, Tokyo 1028554, Japan
关键词
InAs; nanowire; field-effect transistor; self-assembly; digital circuit; TRANSISTORS;
D O I
10.1587/transele.E95.C.1369
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on the fabrication and analysis of basic digital circuits containing In As nanowire transistors on a host substrate. The nanowires were assembled at predefined positions by means of electric field-assisted self-assembly within each run generating numerous circuits simultaneously. Inverter circuits composed of two separated nanowire transistors forming a driver and an active load have been fabricated. The inverter circuits exhibit a gain (>1) in the MHz regime and a time constant of about 0.9 ns. A sample & hold core element is fabricated based on an In As nanowire transistor connected to a hold capacitor, both on a Silicon and an InP isolating substrate, respectively. The low leakage read-out of the hold capacitor is done by InP-based metal-insulator heterojunction FET grown on the same substrate prior to nanowire FET fabrication. Experimental operation of the circuit is demonstrated at 100 MHz sampling frequency. The presented approach enables III/V high-speed, low-voltage logic circuits on a wide variety of host substrates which may be up scaled to high volume circuits.
引用
收藏
页码:1369 / 1375
页数:7
相关论文
共 21 条
[11]  
Otsuhata Y., 2009, SEM DEV RES S ISDRS0, DOI [10.1109/IS-DRS.2009.5378302, DOI 10.1109/IS-DRS.2009.5378302]
[12]   Design of sample-and-hold amplifiers for high-speed low-voltage A/D converters [J].
Razavi, B .
PROCEEDINGS OF THE IEEE 1997 CUSTOM INTEGRATED CIRCUITS CONFERENCE, 1997, :59-66
[13]   CMOS inverter based on gate-all-around silicon-nanowire MOSFETs fabricated using top-down approach [J].
Rustagi, S. C. ;
Singh, N. ;
Fang, W. W. ;
Buddharaju, K. D. ;
Ornampuliyur, S. R. ;
Teo, S. H. G. ;
Tung, C. H. ;
Lo, G. Q. ;
Balasubramanian, N. ;
Kwong, D. L. .
IEEE ELECTRON DEVICE LETTERS, 2007, 28 (11) :1021-1024
[14]   Logic circuits based on individual semiconducting and metallic carbon-nanotube devices [J].
Ryu, Hyeyeon ;
Kaelblein, Daniel ;
Weitz, R. Thomas ;
Ante, Frederik ;
Zschieschang, Ute ;
Kern, Klaus ;
Schmidt, Oliver G. ;
Klauk, Hagen .
NANOTECHNOLOGY, 2010, 21 (47)
[15]  
Schvan Peter, 2008, 2008 IEEE International Solid-State Circuits Conference - Digest of Technical Papers, P544, DOI 10.1109/ISSCC.2008.4523298
[16]   Electric-field assisted assembly and alignment of metallic nanowires [J].
Smith, PA ;
Nordquist, CD ;
Jackson, TN ;
Mayer, TS ;
Martin, BR ;
Mbindyo, J ;
Mallouk, TE .
APPLIED PHYSICS LETTERS, 2000, 77 (09) :1399-1401
[17]   Parallel Array InAs Nanowire Transistors for Mechanically Bendable, Ultrahigh Frequency Electronics [J].
Takahashi, Toshitake ;
Takei, Kuniharu ;
Adabi, Ehsan ;
Fan, Zhiyong ;
Niknejad, Ali M. ;
Javey, Ali .
ACS NANO, 2010, 4 (10) :5855-5860
[18]   Vertical enhancement-mode InAs nanowire field-effect transistor with 50-nm wrap gate [J].
Thelander, Claes ;
Froberg, Linus E. ;
Rehnstedt, Carl ;
Samuelson, Lars ;
Wemersson, Lars-Erik .
IEEE ELECTRON DEVICE LETTERS, 2008, 29 (03) :206-208
[19]   Improved three-step de-embedding method to accurately account for the influence of pad parasitics in silicon on-wafer RF test-structures [J].
Vandamme, EP ;
Schreurs, DMMP ;
van Dinther, G .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2001, 48 (04) :737-742
[20]   VAPOR-LIQUID-SOLID MECHANISM OF SINGLE CRYSTAL GROWTH ( NEW METHOD GROWTH CATALYSIS FROM IMPURITY WHISKER EPITAXIAL + LARGE CRYSTALS SI E ) [J].
WAGNER, RS ;
ELLIS, WC .
APPLIED PHYSICS LETTERS, 1964, 4 (05) :89-&