InAs Nanowire Circuits Fabricated by Field-Assisted Self-Assembly on a Host Substrate

被引:8
作者
Blekker, Kai [1 ]
Richter, Rene [1 ]
Oda, Ryosuke [2 ]
Taniyama, Satoshi [2 ]
Benner, Oliver [1 ]
Keller, Gregor [1 ]
Muenstermann, Benjamin [1 ]
Lysov, Andrey [1 ]
Regolin, Ingo [1 ]
Waho, Takao [2 ]
Prost, Werner [1 ]
机构
[1] Univ Duisburg Essen, Dept Solid State Elect, D-47057 Duisburg, Germany
[2] Sophia Univ, Dept Elect & Elect Engn, Tokyo 1028554, Japan
关键词
InAs; nanowire; field-effect transistor; self-assembly; digital circuit; TRANSISTORS;
D O I
10.1587/transele.E95.C.1369
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on the fabrication and analysis of basic digital circuits containing In As nanowire transistors on a host substrate. The nanowires were assembled at predefined positions by means of electric field-assisted self-assembly within each run generating numerous circuits simultaneously. Inverter circuits composed of two separated nanowire transistors forming a driver and an active load have been fabricated. The inverter circuits exhibit a gain (>1) in the MHz regime and a time constant of about 0.9 ns. A sample & hold core element is fabricated based on an In As nanowire transistor connected to a hold capacitor, both on a Silicon and an InP isolating substrate, respectively. The low leakage read-out of the hold capacitor is done by InP-based metal-insulator heterojunction FET grown on the same substrate prior to nanowire FET fabrication. Experimental operation of the circuit is demonstrated at 100 MHz sampling frequency. The presented approach enables III/V high-speed, low-voltage logic circuits on a wide variety of host substrates which may be up scaled to high volume circuits.
引用
收藏
页码:1369 / 1375
页数:7
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